MEMS Precision Work

HT Micro designs, develops, and manufactures metal MEMS sensors, switches, and components. Combining state of the art high aspect ratio lithography and electroforming with MEMS designs HT enables production of complex three-dimensional mechanisms that maintaining tolerances in the sub-millimeter range. The technology’s advantage comes from the ability to perform wafer level processing within a very broad range of materials. The technology for wafer level processing is well known in the IC industry; however, precision mechanical fabrication in a wide variety of metals is not. HT Micro has advanced processes that enable miniaturization of magnetic and mechanical switch components without sacrificing performance. HARM allows for designs with an out of the plane feature height considerably greater than the width of the feature. This aspect ratio creates more area for flexures employed in mechanical designs. Reliability is the benefit of the high aspect ratio fabrication.